Chen Sujun Beijing Beiyi Innovation Vacuum Technology Co., Ltd., Beijing 100022, China The equipment, due to the inevitable presence of oil vapor backflow, affects the quality of the deposited film, only the use of non-oil pumps, such as molecular pumps, cryogenic pumps to replace the oil diffusion pump can eliminate. Vacuum coating equipment using a molecular pump as a main pump has been popularized. As for the performance of cryopumps, domestic customers and equipment manufacturers are still not fully aware of them and used them as main pumps for vacuum coating equipment. The article describes the Beijing Beiyi Innovation Vacuum Equipment Co., Ltd. (North Instrument) and Japan Vacuum Technology Co., Ltd., with the company's CRYO-U20H cryopump produced in North Instrument ZZSX-1200 vacuum coating equipment to replace the original equipment, the main pump (KA-800 oil diffusion pump) for pumping performance and evaporation coating conditions. Vacuum test of NEG coating on the inner surface of the accelerator vacuum box Song Hong The high-strength (538mA) particle accelerator of the Institute of High Energy Physics, Chinese Academy of Sciences. In its linear section vacuum system, most of the vacuum box's inner surface is coated with NEG film, so that in a thin, long vacuum box, the NEG film can act as a distribution pump when a beam passes through. Moreover, NEG thin films also have the effect of lowering the secondary electron emission coefficient, so it is important to understand the vacuum properties of NEG coatings. Nanoscale Micromachining Technology and Its Application in Condensed Matter Physics Research Gu Changzhi Micromachining. This article describes the preparation of SiOx thin films by evaporating SiO powder and subsequent heat treatment to fabricate nc-Si/SiO2 systems. Then the doping of Ce elements is introduced. The changes of photoluminescence with doping concentration are studied and the reasons for the enhancement of fluorescence are analyzed. Relationship between CeF3 Doping Concentration and ncSi Photoluminescence Intensity Novel Carbon Nanotube Field Emission Display (CNT-FB3) Gray Modulation Method LI Chen ZHANG Yu NING Zong XIANG Ma Xiaodian LEI Wei ZHANG Xiaobing Department of Electronic Engineering, Southeast University Nanjing 210096 (LCD) Competing flat-panel displays. And because carbon nanotubes have high mechanical strength, good chemical stability
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From vacuum microelectronics to vacuum nanoelectronics
From vacuum microelectronics to vacuum nanoelectronics
Core Tip: Chen Sujun Beijing Beiyi Innovation Vacuum Technology Co., Ltd., Beijing 100022 Equipment, due to the inevitable presence of oil vapor reflux, affect the quality of the film coating, only the use of non-oil pumps, such as molecular pumps, cryopumps to replace the oil diffusion pump Can be eliminated. Vacuum coating equipment with molecular pump as main pump